Comparison of surface and subsurface damage of mosaic single-crystal diamond substrate processed by mechanical and plasma-assisted polishing
Sign Up to like & getrecommendations! Published in 2021 at "Diamond and Related Materials"
DOI: 10.1016/j.diamond.2021.108555
Abstract: Abstract The surface and subsurface damage of a mosaic single-crystal diamond (SCD) (100) substrate processed by mechanical polishing (MP) and plasma-assisted polishing (PAP) were studied. Scanning white-light interferometer (SWLI) (84-μm square) observation for different local… read more here.
Keywords: subsurface damage; damage; diamond; substrate ... See more keywords
Double-sided and single-sided polished 6H-SiC wafers with subsurface damage layer studied by Mueller matrix ellipsometry
Sign Up to like & getrecommendations! Published in 2020 at "Journal of Applied Physics"
DOI: 10.1063/5.0026124
Abstract: The complex optical constants and the subsurface damage layer of uniaxial doped 6H-SiC wafers are measured using Mueller matrix spectroscopic ellipsometry. A comparison is made between measurements on a single-sided polished wafer that can be… read more here.
Keywords: single sided; ellipsometry; subsurface damage; damage layer ... See more keywords
Research of Subsurface Damage Depth of Lithium Niobate Crystal by Fixed-Abrasive Lapping
Sign Up to like & getrecommendations! Published in 2020 at "Integrated Ferroelectrics"
DOI: 10.1080/10584587.2020.1728828
Abstract: Abstract The subsurface damage depth of optical material introduced by lapping determines the efficiency of lapping and polishing process. In order to explore the subsurface damage (SSD) of fixed-abrasive lapping process, angle polishing method was… read more here.
Keywords: subsurface; fixed abrasive; subsurface damage; abrasive lapping ... See more keywords
Molecular dynamics simulation of subsurface damage mechanism during nanoscratching of single crystal silicon
Sign Up to like & getrecommendations! Published in 2019 at "Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology"
DOI: 10.1177/1350650118765351
Abstract: Three-dimension molecular dynamics (MD) simulation is employed to investigate the nanoscratching process of monocrystalline silicon with diamond tools. The effects of tool geometry on subsurface damage and scratching surface integrity are investigated by analyzing phase… read more here.
Keywords: molecular dynamics; subsurface damage; damage; dynamics simulation ... See more keywords
Theoretical model and digital extraction of subsurface damage in ground fused silica.
Sign Up to like & getrecommendations! Published in 2022 at "Optics express"
DOI: 10.1364/oe.459132
Abstract: Based on the fracture mechanics and grinding kinematics, a theoretical model is developed to determine various subsurface damage (SSD) parameters and roughness Rz of the ground brittle material with consideration of the material removal mode… read more here.
Keywords: fused silica; ground; ssd depth; subsurface damage ... See more keywords
Subsurface Damage in Polishing Process of Silicon Carbide Ceramic
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DOI: 10.3390/ma11040506
Abstract: Subsurface damage (SSD) in the polishing process of silicon carbide (SiC) ceramic presents one of the most significant challenges for practical applications. In this study, the theoretical models of SSD depth are established on the… read more here.
Keywords: process silicon; depth; silicon carbide; subsurface damage ... See more keywords