Deep-subwavelength single grooves prepared by femtosecond laser direct writing on Si
Sign Up to like & getrecommendations! Published in 2024 at "Chinese Physics B"
DOI: 10.1088/1674-1056/ad4cd6
Abstract: It is well known that femtosecond laser pulses can easily spontaneously induce deep-subwavelength periodic surface structures on transparent dielectrics but not on non-transparent semiconductors. Nevertheless, in this study, we demonstrate that using high-numerical-aperture 800 nm… read more here.
Keywords: deep subwavelength; femtosecond laser; subwavelength single; subwavelength ... See more keywords