2D Super‐Resolution Metrology Based on Superoscillatory Light
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DOI: 10.1002/advs.202404607
Abstract: Progress in the semiconductor industry relies on the development of increasingly compact devices consisting of complex geometries made from diverse materials. Precise, label‐free, and real‐time metrology is needed for the characterization and quality control of… read more here.
Keywords: superoscillatory light; optical metrology; metrology; resolution metrology ... See more keywords