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Published in 2021 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2020.111478
Abstract: Abstract Soft and flexible microelectrodes are fabricated and patterned in a novel approach integrating supersonic cluster beam deposition (SCBD) of gold nanoparticles onto Polydimethylsiloxane (PDMS) followed by femtosecond (fs) laser processing. SCBD of gold nanoparticles…
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Keywords:
cluster beam;
supersonic cluster;
femtosecond laser;
gold ... See more keywords