Thickness measurement method for self-supporting film with double chromatic confocal probes
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DOI: 10.1364/ao.432384
Abstract: With the randomness and immeasurability properties of zero point, the conventional self-supporting film thickness measurement model must calibrate the distance between two chromatic confocal sensors using a standard part whose thickness needs to be measured… read more here.
Keywords: thickness measurement; method; film; self supporting ... See more keywords