Rayleigh Wave Suppression in Al0.6Sc0.4N-on-SiC Resonators
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DOI: 10.1109/led.2025.3620683
Abstract: We report on the fabrication of a Hybrid SAW/BAW resonator made of a thin layer of Sc-doped AlN (AlScN) with a Sc concentration of 40 at% on a 4H-SiC substrate. A Sezawa mode, excited by… read more here.
Keywords: suppression al0; al0 6sc0; idt; wave suppression ... See more keywords