Investigation of ‘surface donors’ in Al2O3/AlGaN/GaN metal-oxide-semiconductor heterostructures: Correlation of electrical, structural, and chemical properties
Sign Up to like & getrecommendations! Published in 2017 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2017.07.195
Abstract: Abstract III-N surface polarization compensating charge referred here to as ‘surface donors’ (SD) was analyzed in Al 2 O 3 /AlGaN/GaN metal-oxide-semiconductor (MOS) heterojunctions using scaled oxide films grown by metal-organic chemical vapor deposition at… read more here.
Keywords: surface; algan gan; metal oxide; chemical ... See more keywords