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Published in 2022 at "Optics express"
DOI: 10.1364/oe.458464
Abstract: This paper reports a new 2D surface-micromachined optical ultrasound transducer (SMOUT) array consisting of 350 × 350 elements with highly uniform optical and acoustic performances. Each SMOUT element consists of a vacuum-sealed Fabry-Perot (F-P) interferometric cavity formed…
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Keywords:
surface micromachined;
ultrasound transducer;
smout array;
smout ... See more keywords