Articles with "surface micromachined" as a keyword



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Large-scale surface-micromachined optical ultrasound transducer (SMOUT) array for photoacoustic computed tomography.

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Published in 2022 at "Optics express"

DOI: 10.1364/oe.458464

Abstract: This paper reports a new 2D surface-micromachined optical ultrasound transducer (SMOUT) array consisting of 350 × 350 elements with highly uniform optical and acoustic performances. Each SMOUT element consists of a vacuum-sealed Fabry-Perot (F-P) interferometric cavity formed… read more here.

Keywords: surface micromachined; ultrasound transducer; smout array; smout ... See more keywords