Design and optimization of fully differential capacitive MEMS accelerometer based on surface micromachining
Sign Up to like & getrecommendations! Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-018-4187-5
Abstract: In this paper, design and simulation of a single-axial, capacitive, fully differential MEMS accelerometer based on surface micromachining with two proof masses is presented. So far, most surface micromachined capacitive accelerometers offered, employed differential interface… read more here.
Keywords: surface micromachining; surface; based surface; accelerometer based ... See more keywords
Conventional surface micromachining process for the fabrication of a linear optical phased array based on piston micromirrors
Sign Up to like & getrecommendations! Published in 2021 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/abfa7f
Abstract: Micro electromechanical system (MEMS) based optical phased array (OPA) technology generally demands narrow and tightly spaced suspended microstructures with high-aspect-ratio in the lateral dimensions. This paper presents an one dimensional OPA system which is fabricated… read more here.
Keywords: array; surface micromachining; optical phased; phased array ... See more keywords