An effective on-line surface particles inspection instrument for large aperture optical element
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DOI: 10.1007/s11633-017-1079-6
Abstract: Surface particles growing in large aperture optical element (LAOE) have significant impact on LAOE’s stable operation. It is a challenge for the online system to inspect the particles with long working distance, enough precision and… read more here.
Keywords: surface particles; system; surface; large aperture ... See more keywords