Experimental demonstration of in situ surface and thickness profile measurements of thin film during deposition using a grating array based wavefront sensor.
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DOI: 10.1364/ol.471336
Abstract: Here we introduce an in situ and non-intrusive surface and thickness profile monitoring scheme of thin-film growth during deposition. The scheme is implemented using a programmable grating array based zonal wavefront sensor integrated with a… read more here.
Keywords: film deposition; surface thickness; film; thin film ... See more keywords