Preparation of Shaped Indium Phosphide Surfaces for Edge-Emitting Devices
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DOI: 10.1134/s0020168519010175
Abstract: Abstract —We have studied the interaction of etchants and etchant mixtures with {100} planes of InP substrates. The results demonstrate that mesa stripes and grooves faceted by a combination of planes differing in polarity—{111}A, {111}B,… read more here.
Keywords: indium phosphide; surfaces edge; preparation shaped; edge emitting ... See more keywords