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Published in 2017 at "Advanced Functional Materials"
DOI: 10.1002/adfm.201605912
Abstract: Suspended planar-array (SPA) chips embody millions of individual miniaturized arrays to work in extremely small volumes. Here, the basis of a robust methodology for the fabrication of SPA silicon chips with on-demand physical and chemical…
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Keywords:
suspended planar;
sub micrometric;
planar array;