Effects of gamma radiation on suspended silicon nanogauges bridge used for MEMS transduction
Sign Up to like & getrecommendations! Published in 2020 at "Microelectronics Reliability"
DOI: 10.1016/j.microrel.2020.113736
Abstract: Abstract This paper proposes a study on the resilience to radiation of MEMS sensors based on piezoresistive transduction by means of suspended silicon nanogauges. It is particularly interesting for applications in severe environment like in… read more here.
Keywords: bridge used; nanogauges bridge; used mems; silicon nanogauges ... See more keywords
Native-oxide limited cross-plane thermal transport in suspended silicon membranes revealed by scanning thermal microscopy
Sign Up to like & getrecommendations! Published in 2017 at "Applied Physics Letters"
DOI: 10.1063/1.4997914
Abstract: By thermally characterizing nanometer-thin suspended silicon membranes with various micrometric lengths in ambient conditions, we determine simultaneously the spatial resolution of our Wollaston-probe scanning thermal microscopy experiment, which probes an area of (285 nm)2, and the… read more here.
Keywords: silicon membranes; microscopy; thermal microscopy; suspended silicon ... See more keywords
Mid Infrared Integrated MZI Gas Sensor Using Suspended Silicon Waveguide
Sign Up to like & getrecommendations! Published in 2019 at "Journal of Lightwave Technology"
DOI: 10.1109/jlt.2019.2924916
Abstract: A novel mid-infrared (MIR) gas sensor is proposed. A sensitivity analysis of the suspended silicon waveguide for gaseous medium index change in the MIR range is also presented. The analysis shows that a suspended silicon… read more here.
Keywords: suspended silicon; gas sensor; silicon waveguide;
High-Q THz Photonic Crystal Cavity on a Low-Loss Suspended Silicon Platform
Sign Up to like & getrecommendations! Published in 2021 at "IEEE Transactions on Terahertz Science and Technology"
DOI: 10.1109/tthz.2020.3019928
Abstract: In this article, we present an ultrahigh-Q cavity at terahertz (THz) frequencies. The designed cavity is built on a low-loss suspended silicon (Si) waveguide. The substrate removal under the waveguide and the use of optimized… read more here.
Keywords: suspended silicon; low loss; loss suspended; cavity ... See more keywords
High-performance thermo-optic tunable grating filters based on laterally supported suspended silicon ridge waveguide.
Sign Up to like & getrecommendations! Published in 2018 at "Optics express"
DOI: 10.1364/oe.26.019479
Abstract: We demonstrate a novel thermally tunable grating optical filter based on suspended silicon ridge waveguide with low power consumption, fast response and relatively high mechanical stability. An enhanced power efficiency of ~300 pm/mW is achieved… read more here.
Keywords: ridge waveguide; tunable grating; silicon ridge; suspended silicon ... See more keywords