Improvement of endurance and switching speed in Hf1−x Zr x O2 thin films using a nanolaminate structure
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DOI: 10.1088/1361-6528/ac79bb
Abstract: To improve the endurance and polarization switching speed of Hf1−x Zr x O2 (HZO) ferroelectric films, we designed a 10 nm Hf0.5Zr0.5O2 + ZrO2 (HZZ) nanolaminate structure. Three films with different ZrO2 interlayers thicknesses were… read more here.
Keywords: switching speed; speed hf1; nanolaminate structure; endurance ... See more keywords