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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13081255
Abstract: The symmetric MEMS gyroscope is a typical representative of inertial navigation sensors in recent years. It is different from the traditional mechanical rotor gyroscope in that it structurally discards the high-speed rotor and other moving…
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Keywords:
symmetric silicon;
mems gyroscope;
mode matching;
review symmetric ... See more keywords