In Situ Synchrotron XRD Characterization of Piezoelectric Al1−xScxN Thin Films for MEMS Applications
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DOI: 10.3390/ma16051781
Abstract: Aluminum scandium nitride (Al1−xScxN) film has drawn considerable attention owing to its enhanced piezoelectric response for micro-electromechanical system (MEMS) applications. Understanding the fundamentals of piezoelectricity would require a precise characterization of the piezoelectric coefficient, which… read more here.
Keywords: al1 xscxn; xscxn; synchrotron xrd; situ synchrotron ... See more keywords