Synthesis of ScAlN thin films on Si (100) substrates at room temperature
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DOI: 10.1007/s00542-017-3660-x
Abstract: Scandium aluminum nitride alloy (ScAlN) thin films have been synthesized using reactive sputtering of a scandium aluminum alloy (Sc0.40Al0.60) target on Si (100) substrates. We have investigated the effects of two sputtering control factors, namely… read more here.
Keywords: thin films; synthesis scaln; films 100; scaln thin ... See more keywords