Synthetic wavelength scanning interferometry for 3D surface profilometry with extended range of height measurement using multi-colour LED light sources
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DOI: 10.1080/09500340.2023.2194454
Abstract: We report three-dimensional surface profilometry with extended range of height measurements using synthetic wavelength scanning interferometry without tunable filters, wavelength-tuning lasers, grating elements. We have used inexpensive multiple colour light emitting diodes (LEDs) and operate… read more here.
Keywords: synthetic wavelength; extended range; height; range ... See more keywords