Smart Systems for Material and Process Designing in Direct Nanoimprint Lithography Using Hybrid Deep Learning
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DOI: 10.3390/nano12152571
Abstract: A hybrid smart process and material design system for nanoimprinting is proposed, which is combined with a learning system based on experimental and numerical simulation results. Instead of carrying out extensive learning experiments for various… read more here.
Keywords: smart systems; systems material; learning; material process ... See more keywords