Articles with "systems mems" as a keyword



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Microelectromechanical Systems (MEMS) for Biomedical Applications

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Published in 2022 at "Micromachines"

DOI: 10.3390/mi13020164

Abstract: The significant advancements within the electronics miniaturization field have shifted the scientific interest towards a new class of precision devices, namely microelectromechanical systems (MEMS). Specifically, MEMS refers to microscaled precision devices generally produced through micromachining… read more here.

Keywords: systems mems; microelectromechanical systems; biomedical applications; mems biomedical ... See more keywords