Concepts and Key Technologies of Microelectromechanical Systems Resonators
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DOI: 10.3390/mi13122195
Abstract: In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality… read more here.
Keywords: mems resonators; technologies microelectromechanical; microelectromechanical systems; systems resonators ... See more keywords