Synthesis and characterization of single-crystalline δ-Ta2O5 epitaxial films on Y-stabilized ZrO2 (111) substrates
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DOI: 10.1016/j.ceramint.2020.10.134
Abstract: Abstract Hexagonal tantalum pentoxide (δ-Ta2O5) epitaxial films were successfully prepared on Y-stabilized ZrO2 (YSZ) (111) substrates by metalorganic chemical vapor deposition. The crystal structure and optical characteristics of the deposited films as a function of… read more here.
Keywords: stabilized zro2; epitaxial films; ta2o5; single crystalline ... See more keywords