Effect of graphite target power density on tribological properties of graphite-like carbon films
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DOI: 10.1016/j.apsusc.2018.01.113
Abstract: Abstract In order to improve the tribological performance, a series of graphite-like carbon (GLC) films with different graphite target power densities were prepared by magnetron sputtering. The valence bond and microstructure of films were characterized… read more here.
Keywords: graphite target; target power; power density;