Influence of Target-Substrate Distance on the Transport Process of Sputtered Atoms: MC-MD Multiscale Coupling Simulation
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DOI: 10.3390/ma15248904
Abstract: A Monte Carlo (MC) and molecular dynamics (MD) coupling simulation scheme for sputtered particle transport was first proposed in this work. In this scheme, the MC method was utilized to model the free-flight process of… read more here.
Keywords: target substrate; transport; coupling simulation; substrate distance ... See more keywords