Frequency Tuning Technique of Piezoelectric Ultrasonic Transducers for Ranging Applications
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DOI: 10.1109/jmems.2018.2831638
Abstract: This paper presents a novel low-cost technique for the frequency tuning of piezoelectric micromachined ultrasonic transducers (PMUT). PMUT devices are fabricated using the PiezoMUMPs technology with resonance frequencies of the first and second modes at… read more here.
Keywords: technique piezoelectric; tuning technique; frequency; ultrasonic transducers ... See more keywords