Silicon-Carbide (SiC) Nanocrystal Technology and Characterization and Its Applications in Memory Structures
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DOI: 10.3390/nano10122387
Abstract: Colloidal cubic silicon-carbide nanocrystals have been fabricated, characterized, and introduced into metal–insulator–semiconductor and metal–insulator–metal structures based on hafnium oxide layers. The fabricated structures were characterized through the stress-and-sense measurements in terms of device capacitance, flat-band… read more here.
Keywords: technology characterization; silicon carbide; nanocrystal technology; carbide sic ... See more keywords