Thermoelectric Energy Micro Harvesters with Temperature Sensors Manufactured Utilizing the CMOS-MEMS Technique
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DOI: 10.3390/mi13081258
Abstract: This study develops a TEMH (thermoelectric energy micro harvester) chip utilizing a commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process. The chip contains a TEMH and temperature sensors. The TEMH is established using a… read more here.
Keywords: thermoelectric energy; temperature sensors; temh; energy micro ... See more keywords