Thermal design aspects for improving temperature homogeneity of silicon wafer during thermal processing in microlithography
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DOI: 10.1016/j.applthermaleng.2020.115118
Abstract: Abstract Stringent temperature control is of great importance in the post-exposure baking of the lithography process, and this is usually maintained through the lamp heating and multizone heating method, which demands a precise control system.… read more here.
Keywords: temperature homogeneity; guide plate; thermal design; temperature ... See more keywords
Temperature Homogeneity under Selective and Localized Microwave Heating in Structured Flow Reactors
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DOI: 10.1021/acs.iecr.0c05580
Abstract: Selective heating of different phases of multiphase systems via microwaves can result in energy savings and suppression of side reactions. However, materials properties and operating conditions tha... read more here.
Keywords: localized microwave; heating; homogeneity selective; temperature homogeneity ... See more keywords