Effects of Temperature and Residual Stresses on the Output Characteristics of a Piezoresistive Pressure Sensor
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DOI: 10.1109/access.2019.2901846
Abstract: The effects of temperature on the output performance of piezoresistive pressure sensors are studied in this paper. The influences of the environmental temperature, the residual stress due to the fabrication process, and the residual stress… read more here.
Keywords: effects temperature; output characteristics; temperature residual; pressure ... See more keywords