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Published in 2018 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2017.07.215
Abstract: Abstract WTiN films were grown on silicon and stainless-steel substrates using the DC magnetron sputtering technique. The substrate temperature was varied taking values of 100 °C, 200 °C, 300 °C, and 400 °C. X-ray diffraction analysis allowed us to…
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Keywords:
temperature;
microscopy;
deposition temperature;
influence deposition ... See more keywords