Research Progress on Micromachining Technologies Used to Fabricate Terahertz Micro-Metallic Rectangular Cavity Structures
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DOI: 10.3390/mi16050518
Abstract: Terahertz metal rectangular cavity structures are widely used in terahertz devices due to their performance advantages, and various microfabrication techniques have been applied to the manufacturing of their high performance. In this paper, several typical… read more here.
Keywords: rectangular cavity; research progress; cavity structures; terahertz micro ... See more keywords