Bimorph Dual-Electrode ScAlN PMUT with Two Terminal Connections
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DOI: 10.3390/mi13122260
Abstract: This paper presents a novel bimorph Piezoelectric Micromachined Ultrasonic Transducer (PMUT) fabricated with 8-inch standard CMOS-compatible processes. The bimorph structure consists of two layers of 20% scandium-doped aluminum nitride (Sc0.2Al0.8N) thin films, which are sandwiched… read more here.
Keywords: terminal connections; outer ring; scaln; plate electrodes ... See more keywords