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Published in 2022 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2022.153080
Abstract: Halogen monolayer on a silicon surface is attracting active attention for applications in electronic device fabrication with individual impurities. To create a halogen mask for the impurities incorporation, it is desirable to be able to…
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Keywords:
bonds terminated;
surface;
dangling bonds;
100 surfaces ... See more keywords