Composition Metrology of Ternary Semiconductor Alloys Analyzed by Atom Probe Tomography
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DOI: 10.1021/acs.jpcc.8b03223
Abstract: Ternary semiconductor alloys based on the AyB1–yC stoichiometry are widely employed in electronic devices, and their composition plays a key role in band gap engineering of heterostructures. We have studied the crucial issue of accuracy… read more here.
Keywords: atom probe; ternary semiconductor; semiconductor alloys; probe tomography ... See more keywords