An efficient atomic layer deposition process of MnOx films using bis(N,N′-di-tert-butylacetamidinato)manganese-(II) and H2O as reactants
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DOI: 10.1016/j.apsusc.2019.04.262
Abstract: Abstract In the study, an efficient process was proposed to prepare ALD MnOx films with bis(N,N′-di-tert-butylacetamidinato)manganese-(II) (Mn(tBu-MeAMD)2) and H2O. The process follows ideal self-limiting growth behaviors. The as-prepared smooth and pure MnOx films with a… read more here.
Keywords: bis tert; butylacetamidinato manganese; tert butylacetamidinato; process ... See more keywords