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Published in 2023 at "IEEE Transactions on Applied Superconductivity"
DOI: 10.1109/tasc.2023.3264778
Abstract: It is now possible to fabricate stacks of buried wires with extremely high density, perfect yield, and many layers using fine-line lithography and chemical mechanical polish. Such wiring in principle will enable large format arrays…
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Keywords:
heatsinking thermally;
buried wiring;
tes arrays;
thermally multiplexed ... See more keywords