Compact On-Wafer Test Structures for Device RF Characterization
Sign Up to like & getrecommendations! Published in 2017 at "IEEE Transactions on Electron Devices"
DOI: 10.1109/ted.2017.2717196
Abstract: The main objective of this paper is to validate the radio frequency (RF) characterization procedure based on compact test structures compatible with 50- $\mu \text{m}$ -pitch RF probes. It is shown that by using these… read more here.
Keywords: tex math; test structures; inline formula;
Test Structures for End-Point Visualization of All-Plasma Dry Release of Deep-RIE MEMS Devices and Application to Release Process Modal Analysis
Sign Up to like & getrecommendations! Published in 2017 at "IEEE Transactions on Semiconductor Manufacturing"
DOI: 10.1109/tsm.2017.2694845
Abstract: Test structures were developed to visualize the progress of the dry release of an MEMS device fabricated by deep reactive ion etching (DRIE). Because of the high aspect ratio of DRIE MEMS devices, the undercut… read more here.
Keywords: mems devices; structure; test; test structures ... See more keywords