A High-Performance MEMS Accelerometer with an Improved TGV Process of Low Cost
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DOI: 10.3390/mi13071071
Abstract: High-performance MEMS accelerometers usually use a pendulum structure with a larger mass. Although the performance of the device is guaranteed, the manufacturing cost is high. This paper proposes a method of fabricating high-performance MEMS accelerometers… read more here.
Keywords: cost; performance mems; tgv process; high performance ... See more keywords