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Published in 2017 at "IEEE Transactions on Nanotechnology"
DOI: 10.1109/tnano.2017.2722686
Abstract: Low-cost thin glass is developed as a promising material to advanced interposers for high density electrical interconnection in 2.5-D and three-dimensional (3-D) integration. In this paper, the electrical–thermal performance of through glass vias is investigated.…
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Keywords:
tgvs;
electrical thermal;
glass;
glass interposer ... See more keywords