Atomic Layer Deposition of La2O3 Film with Precursor La(thd)3-DMEA
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DOI: 10.3390/coatings13050870
Abstract: In this paper, a new precursor La(thd)3-DMEA (thd = 2,2,6,6-tetramethyl-3,5-heptanedione, DMEA = N,N′-dimethylethylenediamine) was synthesized and characterized with 1H-NMR and X-ray single crystal diffraction. The thermal properties of La(thd)3-DMEA were checked by thermogravimetric analysis (TGA),… read more here.
Keywords: atomic layer; thd; layer deposition; thd dmea ... See more keywords