Active lens for thermal aberration compensation in lithography lens.
Sign Up to like & getrecommendations! Published in 2018 at "Applied optics"
DOI: 10.1364/ao.57.008654
Abstract: High laser absorption and strong resolution enhancement technology make thermal aberration control of lithography lenses more challenging. We present an active lens that uses four bellows actuators to generate astigmatism (Z5) on the lens surface.… read more here.
Keywords: aberration; active lens; aberration compensation; lithography ... See more keywords