Growth of Al-rich AlGaN thin films by purely thermal atomic layer deposition
Sign Up to like & getrecommendations! Published in 2021 at "Journal of Alloys and Compounds"
DOI: 10.1016/j.jallcom.2020.157186
Abstract: Abstract AlGaN films with high Al content (Al/Ga ∼5.5) were successfully grown via thermal atomic layer deposition at low temperature (342 °C) using trimethylaluminum and triethylgallium as Al and Ga precursors, respectively, and ammonia as reactant… read more here.
Keywords: growth; layer; atomic layer; deposition ... See more keywords
Non-quarter-wave dielectric mirror prepared by thermal atomic layer deposition
Sign Up to like & getrecommendations! Published in 2020 at "Optics and Laser Technology"
DOI: 10.1016/j.optlastec.2020.106143
Abstract: Abstract In this work we design and fabricate from n(λ) and k(λ) experimental data for both Al2O3 and TiO2 single layer materials, an optical coating as “dielectric-mirror” following the non-quarter-wave stack formula (HxLy)8Hx. Optical coating… read more here.
Keywords: layer; atomic layer; quarter wave; non quarter ... See more keywords
Thermal Atomic Layer Etching of MoS2 Using MoF6 and H2O
Sign Up to like & getrecommendations! Published in 2023 at "Chemistry of Materials"
DOI: 10.1021/acs.chemmater.2c02549
Abstract: Two-dimensional (2D) layered materials offer unique properties that make them attractive for continued scaling in electronic and optoelectronic device applications. Successful integration of 2D materials into semiconductor manufacturing requires high-volume and high-precision processes for deposition… read more here.
Keywords: atomic layer; layer; thermal atomic; mos2 ... See more keywords
High growth per cycle thermal atomic layer deposition of Ni films using an electron-rich precursor.
Sign Up to like & getrecommendations! Published in 2019 at "Nanoscale"
DOI: 10.1039/c8nr08040b
Abstract: An efficient process for thermal atomic layer deposition (ALD) of Ni film with high growth per cycle (GPC) value is developed in this study using an electron-rich compound (N,N,N',N'-tetramethylethylenediamine) (bis(2,4-pentanedionato)) nickel(ii) and anhydrous hydrazine as… read more here.
Keywords: high growth; atomic layer; per cycle; cycle ... See more keywords
Thermal and atomic effects on coupled-channels heavy-ion fusion
Sign Up to like & getrecommendations! Published in 2023 at "Physical Review C"
DOI: 10.1103/physrevc.107.054609
Abstract: Stellar nuclear fusion reactions take place in a hot, dense plasma within stars. To account for the effect of these environments, the theory of open quantum systems is used to conduct pioneering studies of thermal… read more here.
Keywords: fusion; channels heavy; atomic effects; thermal atomic ... See more keywords
Coupling Thermal Atomic Vapor to Slot Waveguides
Sign Up to like & getrecommendations! Published in 2018 at "Physical Review X"
DOI: 10.1103/physrevx.8.021032
Abstract: Ralf Ritter, Nico Gruhler, Helge Dobbertin, Harald Kübler, Stefan Scheel, Wolfram Pernice, Tilman Pfau, and Robert Löw 5. Physikalisches Institut and Center for Integrated Quantum Science and Technology, Universität Stuttgart, Pfaffenwaldring 57, 70550 Stuttgart, Germany… read more here.
Keywords: germany; slot waveguides; atomic vapor; vapor slot ... See more keywords
In silico design of a thermal atomic layer etch process of cobalt
Sign Up to like & getrecommendations! Published in 2021 at "Journal of Vacuum Science and Technology"
DOI: 10.1116/6.0000804
Abstract: Thermal atomic layer etch (ALE), facilitating the removal of up to one monolayer of material per cycle, is growing in importance for thin-film processing. The number of available ALE processes is much smaller than for… read more here.
Keywords: atomic layer; process; etch; layer etch ... See more keywords