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Published in 2019 at "Optics express"
DOI: 10.1364/oe.27.010456
Abstract: We first optimize the design and compare the performance of thermo-optic phase-shifters based on TiN metal and N++ doped silicon, in the same SOI process. The designs don't require special material processing, show negligible loss,…
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Keywords:
optic phase;
thermal crosstalk;
soi;
thermo optic ... See more keywords