Thermal design aspects for improving temperature homogeneity of silicon wafer during thermal processing in microlithography
Sign Up to like & getrecommendations! Published in 2020 at "Applied Thermal Engineering"
DOI: 10.1016/j.applthermaleng.2020.115118
Abstract: Abstract Stringent temperature control is of great importance in the post-exposure baking of the lithography process, and this is usually maintained through the lamp heating and multizone heating method, which demands a precise control system.… read more here.
Keywords: temperature homogeneity; guide plate; thermal design; temperature ... See more keywords
Thermal Design of Linear Induction and Synchronous Motors for Electromagnetic Launch of Civil Aircraft
Sign Up to like & getrecommendations! Published in 2017 at "IEEE Transactions on Plasma Science"
DOI: 10.1109/tps.2017.2697941
Abstract: The engine size of modern passenger transport aircraft is principally determined by take-off conditions, since initial acceleration requires maximum engine power. An electromagnetic launch (EML) system could provide some or all of the energy required… read more here.
Keywords: aircraft; electromagnetic launch; thermal design; civil aircraft ... See more keywords
Optimization thermal design method for space cameras based on thermo-optical analysis and Taguchi method
Sign Up to like & getrecommendations! Published in 2020 at "Optical Engineering"
DOI: 10.1117/1.oe.59.7.075101
Abstract: Abstract. Thermal design is highly related to the performance of space cameras as temperature changes cause thermal displacements of the cameras’ optical and mechanical systems, consequently affecting imaging quality. However, most existing thermal design methods… read more here.
Keywords: taguchi method; design; thermal design; space cameras ... See more keywords