Formation of thermal donor enhanced by oxygen precipitation in silicon crystal
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DOI: 10.1063/1.5140206
Abstract: The formation of thermal donors in silicon is investigated using Czochralski silicon crystals grown with different grown-in defect regions, such as voids and nuclei of oxidation-induced stacking faults. It was found that the formation rate… read more here.
Keywords: formation thermal; thermal donor; formation; silicon ... See more keywords