Influence of extended crystallographic defects on the formation kinetics of oxygen-related thermal donors in multicrystalline silicon
Sign Up to like & getrecommendations! Published in 2019 at "Journal of Crystal Growth"
DOI: 10.1016/j.jcrysgro.2019.01.008
Abstract: Abstract Oxygen-related thermal donors generated generally form less effectively in multicrystalline than in Czochralski grown monocrystalline silicon. In addition to a lower interstitial oxygen concentration, carbon and extended crystallographic defects are possible candidates that can… read more here.
Keywords: multicrystalline silicon; formation; related thermal; thermal donors ... See more keywords
Formation of thermal donor enhanced by oxygen precipitation in silicon crystal
Sign Up to like & getrecommendations! Published in 2020 at "AIP Advances"
DOI: 10.1063/1.5140206
Abstract: The formation of thermal donors in silicon is investigated using Czochralski silicon crystals grown with different grown-in defect regions, such as voids and nuclei of oxidation-induced stacking faults. It was found that the formation rate… read more here.
Keywords: formation thermal; thermal donor; formation; silicon ... See more keywords