Local monitoring of atomic steps on GaAs(001) surface under oxidation, wet removal of oxides and thermal smoothing
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DOI: 10.1016/j.apsusc.2017.02.062
Abstract: Abstract The GaAs(001) step-terraced surface relief is studied under oxidation, wet oxide removal and thermal smoothing by ex situ atomic force microscopy with local monitoring of specific atomic steps using lithographic marks for surface area… read more here.
Keywords: thermal smoothing; atomic steps; surface; oxidation wet ... See more keywords
Thermal Smoothing and Roughening of GaAs Surfaces: Experiment and Monte Carlo Simulation
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DOI: 10.1134/s1063782618050147
Abstract: GaAs thermal smoothing at temperatures T ≤ 650°C in the conditions close to equilibrium yields surfaces with atomically smooth terraces separated by steps of monatomic height. At higher temperatures surface smoothing is changed to roughening.… read more here.
Keywords: carlo simulation; smoothing roughening; thermal smoothing; monte carlo ... See more keywords