MEMS-based thermoelectric infrared sensors: A review
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DOI: 10.1007/s11465-017-0441-2
Abstract: In the past decade, micro-electromechanical systems (MEMS)-based thermoelectric infrared (IR) sensors have received considerable attention because of the advances in micromachining technology. This paper presents a review of MEMS-based thermoelectric IR sensors. The first part… read more here.
Keywords: thermoelectric infrared; based thermoelectric; review mems; mems based ... See more keywords