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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13020258
Abstract: In this article, we present the design, fabrication, and characterization of a thermopile infrared sensor array (TISA) pixel. This TISA pixel is composed of a dual-layer p+/n- poly-Si thermopile with a closed membrane and an…
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Keywords:
thermopile infrared;
thermopile;
pixel;
sensor array ... See more keywords